Charged particle emission source structure
AssigneeDenki Kagaku Kogyo Kabushiki Kaisha
InventorsHirotoshi Hagiwara, Akio Rokugawa, Naoyuki Okamoto, Tsunemasa Inoue
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Abstract
A charged particle emission source structure comprising a needle-like electrode for emission of charged particles, a reservoir for a liquid metal for wetting the surface of the needle-like electrode, heat-generating support members for heating the liquid metal and holding the reservoir or the needle-like electrode, and an extraction electrode for applying an electric field as between it and the needle-like electrode, which is characterized in that conductive partitions hardly wettable with the liquid metal are provided between the heat-generating support members and the reservoir or the needle-like electrode.
Claims20
A charged particle emission source structure comprising a needle-like electrode for emission of charged particles, a reservoir for a liquid metal for wetting the surface of the needle-like electrode, heat-generating support members for heating the liquid metal and holding the reservoir or the needle-like electrode, and an extraction electrode for applying an electric field as between it and the needle-like electrode, which is characterized in that conductive partitions hardly wettable with the liquid metal are provided between the heat-generating support members and the reservoir or the needle-like electrode,
- wherein the reservoir and the needle-like electrode are bonded by a material hardly wettable with the liquid metal, and the base portion of the needle-like electrode is held by the heat-generating support members with the partitions interposed between the base portion and the heat-generating support member.
A charged particle emision source structure comprising a needle-like electrode for emission of charged particles, a reservoir for a liquid metal for wetting the surface of the needle-like electrode, heat-generating support members for heating the liquid metal and holding the reservoir or the needle-like electrode, and an extraction electrode for applying an electric field as between it and the needle-like electrode, which is characterized in that conductive partitions hardly wettable with the liquid metal are provided between the heat-generating support members and the reservoir or the needle-like electrode,
- wherein the partitions are plates having a surface area larger than the surface area for contact with the heat-generating support members.
A charged particle emission source structure comprising a needle-like electrode for emission of charged particles, a reservoir for a liquid metal for wetting the surface of the needle-like electrode, a heat-generating support member for heating the liquid metal and holding the reservoir or the needle-like electrode, and an extraction electrode for applying an electric field as between it and the needle-like electrode, which is characterized in that conductive partitions hardly wettable with the liquid metal are provided between the heat-generating support members and the reservoir or the needle-like electrode,
- wherein the partitions are plates with periphery flanged towards the heat-generating support members side.
Dependencies are inferred from the claim text.