Scanning electron microscope for visualization of wet samples

A device for obtaining microscopic data or images of specimens which comprises:

• a. an electron source for emitting a beam of electrons into an electron optical vacuum column;
• b. the electron optical vacuum column including means for focusing the beam of electrons and means for scanning the surface of a specimen with the focused beam of electrons;
• c. a differentially pumped aperture column attached to the electron optical vacuum column and having at least three walls perpendicular to the sides of the differentially pumped aperture column and defining a series of pressure gradients, each wall having an aperture aligned to permit the beam of electrons to pass through the differentially pumped aperture column;
• d. a specimen chamber for holding the specimen to be scanned with the focused beam of electrons and capable of being maintained at a pressure which may be different from that of the electron optical vacuum column and the differentially pumped aperture column and attached to the differentially pumped aperture column so as to allow the focused beam of electrons to enter into the specimen chamber;
• e. a specimen mount located within the specimen chamber and positioned for supporting the specimen to be scanned with the focused beam of electrons;
• f. means within the specimen chamber for preventing the buildup of negative charge on the surface of the specimen;
• g. a detector disposed wholly within the specimen chamber and positioned with respect to a specimen supported by the specimen mount so as to detect a signal emitted from the specimen upon the scanning of the specimen with the focused beam of electrons, the detector providing an electrical signal output representative of the signal detected thereby;
• and
• h. means for displaying and recording the information provided by the output from the detector.