Electrophotographic photosensitive member, process and apparatus for the preparation thereof
AssigneeCanon Kabushiki Kaisha
InventorsShunichi Ishihara, Keishi Saito, Shunri Oda, Isamu Shimizu
Life of this patent
Estimating the term…
Abstract
A process and an apparatus for preparing an electrophotographic photosensitive member with the use of an active species and a precursor in the absence of a plasma.
Claims18
A process for preparing an electrophotographic photosensitive member which comprises introducing an active species into a film forming space through a transportation space for the active species and a precursor into the film forming space through a transportation space for the precursor and chemically and mutually reacting the active species and the precursor in the film forming space in the absence of a plasma to form a light accepting layer on a substrate for electrophotography being placed in the film forming space.
An apparatus for preparing an electrophotographic photosensitive member which comprises an active species generation chamber, an active species transportation passage being situated at the downstream-side of the active species generation chamber, a precursor generation chamber, a precursor transportation passage being situated separately from and within the active species transportation passage, a microwave power source being electrically connected to the active species generation chamber and the precursor generation chamber, and a film formation chamber having a substrate supporting means.
An apparatus for preparing an electrophotographic photosensitive member which comprises a double conduit having an outer passage for an active species and an inner passage for a precursor, microwave power source being electrically connected to the circumference of the double conduit and a film forming chamber having a substrate supporting means.
Dependencies are inferred from the claim text.