Surface treatment apparatus

A surface treatment apparatus comprising:

• a supporting die for holding a substrate which is to be treated, on the upper surface of said die to heat or cool the substrate;
• said supporting die having in the upper surface thereof a pair of mutually-parallel grooves with substrate conveyor belts therein and means for moving said belts for allowing said substrate conveyor belts to be selectively lifted to points above the upper surface of the supporting die or lowered to points below the upper surface of the supporting die;
• a cover capable of advancing close to the supporting die or into point-to-point contact with the supporting die to define a treatment space over the entire upper surface of the substrate on the supporting die, said cover having a hole therethrough for the introduction of a surface treatment agent into the treatment space;
• and
• an evacuation chamber provided on the peripheral side wall of the supporting die, whereby the surface treatment agent is allowed to flow from the treatment space into the evacuation chamber.

A surface treatment apparatus comprising:

• a supporting die for holding a substrate, which is to be treated, on the upper surface thereof to heat or cool the substrate, said supporting die defining vacuum suction holes therethrough so as to hold the substrate under vacuum on the supporting die, said die having a peripheral side wall;
• a cover capable of advancing close to the supporting die or into point-to-point contact with the supporting die to define a treatment space over the entire upper surface of the substrate on the supporting die, said cover defining a hole therethrough for the introduction of a surface treatment agent into the treatment space;
• a straightening plate provided underneath the hole through which the surface treatment agent is introduced into the treatment space;
• and
• an evacuation chamber provided on and entirely surrounding the peripheral side wall of the supporting die, whereby the surface treatment agent is allowed to flow from the treatment space into the evacuation chamber.

A surface treatment apparatus comprising:

• a supporting die for holding a substrate, which is to be treated, on the upper surface of said die to heat or cool the substrate, said supporting die including vacuum suction holes therethrough so as to hold the substrate under vacuum on the supporting die, said supporting die further including in the upper surface thereof a pair of mutually-parallel grooves with substrate conveyor belts therein and means for moving said belts for allowing said substrate conveyor belts to be selectively lifted to points above the upper surface of the supporting die or lowered to points below the upper surface of the supporting die;
• a cover capable of advancing close to the supporting die or into point-to point contact with the supporting die to define a treatment space over the entire upper surface of the substrate on the supporting die, said cover having a hole therethrough for the introduction of a surface treatment agent into the treatment space;
• a straightening plate provided underneath the hole through which the surface treatment agent is introduced into the treatment space;
• and
• an evacuation chamber provided on the peripheral side wall of the supporting die, whereby the surface treatment agent is allowed to flow from the treatment space into the evacuation chamber.