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US 4,692,782 AGranted
Semiconductor radioactive ray detector
AssigneeFuji Electric Corporate Research and Development Ltd.
InventorsYasukazu Seki, Noritada Sato, Masaya Yabe
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Abstract
In the representative radiation detectors described in the specification, an amorphous silicon layer is grown on one or both of the opposed electrode surfaces of a single crystal silicon substrate and the amorphous silicon layer extends to the side surface of the substrate. The corresponding electrode is deposited on the amorphous silicon layer. Detectors may also be made using a single crystal of Ge, GeAs or CdTe with an amorphous layer of the same or another semiconductor material.
Claims4
A semiconductor radiation detector comprising
- a single crystal semiconductor substrate having a specific resistance of at least 10 K.OMEGA.-cm, and having electrode surfaces separated by side surfaces,
- an undoped amorphous semiconductor layer having a specific resistance substantially higher than that of said substrate, said amorphous layer coating at least one of said electrode surfaces at least up to the side surfaces,
- a first electrode deposited on said amorphous layer, and
- a second electrode deposited over the other of said electrode surfaces.
1 more element
Dependencies are inferred from the claim text.