Optical waveguide and method for making the same
AssigneeHitachi, Ltd.
InventorsToshio Kobayashi, Kazumasa Takagi, Tokuumi Fukazawa
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Abstract
Optical waveguide and the method for making the same, in which a semiconductor laser diode and an optical isolator are formed on one substrate in a monolithic manner. At the moment, a semiconductor laser diode is made by a III-V compound semiconductor crystal, such as GaAs, InP, etc., and an optical isolator is made of iron garnet to fabricate these in monolithic, and this invention was established by developing the technology to monocrystallize at least a small part of the garnet film containing no iron which is deposited on the semiconductor substrate and to use this as the seed crystal for the said phase epitaxial growth of the iron garnet film which forms the iron garnet optical waveguide.
Claims12
An optical waveguide comprising:
- a substrate;
- a garnet layer formed over said substrate, said garnet layer containing no iron and having a monocrystal region formed in a part thereof;
- and
- an iron garnet monocrystal layer provided on said monocrystal region.
A method for manufacturing an optical waveguide comprising steps of:
- forming, over a substrate, a garnet layer containing no iron;
- monocrystallizing said garnet layer through zone melting to form a monocrystal region in a part thereof;
- forming an iron garnet thin film on said monocrystal region of said garnet layer;
- and
- monocrystallizing said iron garnet thin film, through solid phase epitaxy, with said monocrystal garnet region being used as seed crystal.
Dependencies are inferred from the claim text.