Electronic matrix arrays and method for making the same
AssigneeEnergy Conversion Devices, Inc.
InventorRobert R. Johnson
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Abstract
A method of making an electronic matrix array atop a non-conductive surface is disclosed. The method includes forming a first set of address lines on the non-conductive surface, depositing continuous layers of semiconductor materials atop the non-conductive surface and the first set of address lines to form a continuous selection means structure, and forming a second set of address lines over the selection means structure. In accordance with one preferred embodiment, the first set of address lines are formed by depositing a continuous layer of material which is convertible from an initially deposited non-conductive state to a conductive state responsive to the impingement of actinic radiation thereon and exposing selected portions of said convertible to actinic radiation.
Claims16
A method of forming an electronic matrix array atop a non-conductive surface formed of a non-conductive material comprising:
- forming a first set of parallel, spaced apart address lines on the non-conductive surface, the address lines being electrically isolated from one another;
- depositing a plurality of continuous layers of semiconductor materials directly atop the non-conductive surface and the first address lines to form a continuous, selection means structure over the non-conductive surface and the first address lines;
- and
- forming a second set of parallel, spaced apart address lines on the continuous selection means structure on the side thereof opposite the non-conductive surface and the first set of address lines with said second set of address lines crossing said first set of address lines at an angle for forming a plurality of crossover points therewith through which selected current paths can be established between respective address lines of said first and second sets of address lines.
A method of making an electronic circuit comprising:
- providing a non-conductive substrate surface;
- depositing on said substrate surface a continuous layer of material convertible from an initially deposited substantially non-conductive state to a relatively high conductive state in response to the impingement of radiation thereon;
- exposing selected portions of said layer of convertible material to radiation to convert said selected portions to said relatively high conductive state to form a first set of interconnect lines;
- depositing a plurality of layers of semiconductor material directly atop said layer of convertible material to form an array of semiconductor devices in contact with said first set of interconnect lines;
- and
- forming a second set of interconnect lines over said layers of semiconductor material in contact with said devices on the side thereof opposite said first set of interconnect lines.
Dependencies are inferred from the claim text.