Photoconducting amorphous carbon
AssigneeAmoco Corporation
InventorRobert W. Standley
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Abstract
A photoconducting sulfur- and hydrogen-doped amorphous carbon is prepared by deposition from a plasma glow discharge in a gas mixture which comprises at least one hydrocarbon and at least one sulfur source.
Claims19
A sulfur- and hydrogen-doped amorphous carbon which is prepared by the process which comprises depositing said doped amorphous carbon from a plasma glow discharge in a gas mixture which comprises at least one hydrocarbon and at least one sulfur source, wherein said gas mixture is at a pressure in the range from about 0.001 to about 1 torr, the composition of said gas mixture is adjusted to yield a doped amorphous carbon which has an atom ratio of hydrogen to carbon which is in the range from about 0.1 to about 2.0 and an atom ratio of sulfur to carbon which is in the range from bout 0.005 to about 0.20, said hydrocarbon is selected from the group consisting of volatile hydrocarbons, and said sulfur source is selected from the group consisting of volatile organic and inorganic compounds which contain sulfur.
A method for the preparation of a sulfur- and hydrogen-doped amorphous carbon film which comprises:
- (a) initiating and sustaining a plasma glow discharge in a gas mixture which comprises at least one hydrocarbon and at least one sulfur source, wherein said gas mixture is at a pressure in the range from about 0.001 to about 1 torr, the composition of said gas mixture is adjusted to yield a doped amorphous carbon which has an atom ratio of hydrogen to carbon which is in the range from about 0.1 to about 2.0 and an atom ratio of sulfur to carbon which is in the range from about 0.005 to about 0.20, said hydrocarbon is selected from the group consisting of volatile hydrocarbons, and said sulfur source is selected from the group consisting of volatile organic and inorganic compounds which contain sulfur;
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- (b) depositing said doped amorphous carbon on a substrate from said plasma glow discharge.
Dependencies are inferred from the claim text.