Plasma processing apparatus
AssigneeToyoda Gosei Co., Ltd.
InventorsKatsuhide Manabe, Yasuhiko Ogisu
Life of this patent
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Abstract
The present invention relates to a plasma processing apparatus comprising a housing chamber which accommodates substances to be painted made of synthetic resin, a rotating support base which is provided in the housing chamber and rotates the substance to be painted, a plurality of hangers which are placed on the rotating support base and supports the substance to be painted, at least one plasma injection tube which is provided in the housing chamber and giving plasma processing to the surface of substance by injecting plasma gas thereto, and a variable speed drive means which rotates the rotating support base at the speed in accordance with a size and a number of substances to be painted.
Claims39
A plasma processing apparatus comprising,
- (a) a housing chamber accommodating substance to be painted made of synthetic resin,
- (b) a rotating support base which is provided in said housing chamber and made rotatable on an axis to rotate the substance to be painted,
- (c) a plurality of hangers which are provided on said rotating support base and support substance to be painted, and
- (d) at least one plasma injection tube which is provided in the housing chamber and executes plasma processing to the surface of substance to be painted by injecting plasma gas thereto.
Dependencies are inferred from the claim text.