Table device
AssigneeHitachi, Ltd.
InventorsHiromu Hirai, Takashi Yamaguchi, Fuyuto Takase, Tomomasa Yoshida
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Abstract
A first table is provided on a fixed base so that the first table can be moved in one of two directions which cross each other at right angles. A second table is provided on the first table so that the second table can be moved in the other direction. Linear motors for applying the driving force to the first and second tables to directly drive these tables are provided between the fixed base and first table and between the first and second tables.
Claims5
A table device having a first table provided on a fixed base so that said first table can be moved in one of two directions which cross each other at right angles, and a second table provided on said first table so that said second table can be moved in the other direction, characterized in that driving means for applying the driving force to said first and second tables consist of linear motors provided between the upper surface of said fixed base and said first table and between the upper surface of said first table and the lower surface of said second table, respectively, said linear motors including movable coils and permanent magnets, said movable coils of said linear motors being provided on the central portions of the lower surfaces of said first and second tables so that said linear motors extend in the directions of movements thereof, said permanent magnets in said linear motors being attached to yokes provided on the upper surfaces of said fixed base and said first table.
Dependencies are inferred from the claim text.