Method for generating a conductive region on a surface of a body of dielectric material
OwnerDieter Baeuerleinventor
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Abstract
A method for generating an area of increased conductivity on the surface of a body of dielectric material, such as for the purpose of attaching electrodes or other electrical interconnections to the area includes the steps of enclosing the surface within a reducing atmosphere and irradiating the portion of the surface corresponding to the desired conductive area with laser radiation for a selected period of time. The atmosphere may be a hydrogen atmosphere at a pressure in the range of 0-1000 HPa. Additionally, the surface may be preheated prior to irradiation.
Claims17
A method for generating a conductive region on a surface of a body of dielectric oxide material comprising the steps of:
- selecting said material from the group consisting of single-crystal perovskite oxide and ceramic perovskite oxide;
- enclosing said surface in a reducing atmosphere;
- and
- irradiating a portion of said surface corresponding to the conductive region to be generated with laser radiation for a selected period of time.
A method as claimed in clam 3 wherein said hydrogen atmosphere is at a pressure of 100 HPa.
A method for generating a conductive region on a surface of a body of dielectric oxide material comprising the steps of:
- selecting said material from the group consisting of single-crystal perovskite oxide and ceramic perovskite oxide;
- heating said surface;
- enclosing said surface in a reducing atmosphere at a selected pressure;
- and
- irradiating said surface at a selected area corresponding to the desired conductive region with a laser for a selected period of time.
A method for generating a conductive region on a surface of a body of dielectric oxide material comprising the steps of:
- selecting said material from the group consisting of single-crystal perovskite oxide and ceramic perovskite oxide;
- enclosing said surface in a reducing atmosphere at least partially consisting of hydrogen at a selected pressure;
- heating said surface in a range of 200.degree.-300.degree.;
- and
- irradiating said surface with a laser at at least one location thereon corresponding to said electrically conductive region.
Dependencies are inferred from the claim text.