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US 4,655,554 AGranted
Spatial light modulator having a capacitively coupled photoconductor
AssigneeThe United States of America as represented by the Secretary of the Air Force
InventorDavid Armitage
Life of this patent
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Abstract
A spatial light modulator in which the photoreceptor is a capacitively coupled semiconductor in the form of a silicon-silicon dioxide-transparent electrode structure.
Claims7
A spatial light modulator comprising:
- a semiconductor element comprising a semiconductor substrate having a first surface and an opposed second surface, a first transparent metallic electrode, a dielectric layer disposed between said first surface of said semiconductor substrate and a surface of said first transparent metallic electrode, and a charge-confining microgroove lattice structure formed in said second surface of said semiconductor substrate;
- a dielectric mirror having a first surface and an opposed second surface, said first surface of said dielectric mirror being adjacent said second surface of said semiconductor substrate;
- an electro-optic crystal having a first surface and an opposed second surface, said first surface of said electro-optic crystal being adjacent said second surface of said dielectric mirror;
- a second transparent electrode having a first surface and an opposed second surface, said first surface of said second transparent electrode being adjacent said second surface of said electro-optic crystal;
- and
- means for applying a voltage pulse between said first transparent electrode and said second transparent electrode.
3 more elements
Dependencies are inferred from the claim text.