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US 4,654,622 AGranted
Monolithic integrated dual mode IR/mm-wave focal plane sensor
AssigneeHoneywell Inc.
InventorsNorman A. Foss, Paul W. Kruse, Jr., R. Andrew Wood
Life of this patent
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Abstract
A monolithic integrated focal plane sensor array having elements sensitive to IR radiation and elements sensitive to mm-wave radiation. The sensor elements of the array sensitive to mm-wave have microantennas coupled to the sensors.
Claims8
An integrated dual-mode infrared and millimeter-wave focal plane sensor array monolithically fabricated on the same silicon wafer comprising:
- a wafer of single crystal silicon having opposing flat surfaces;
- a first linear or two-dimensional array of infrared sensitive sensors being fabricated on a first surface of said wafer said infrared sensors each having electrical output means;
- and,
- a further linear or two dimensional array of mm-wave sensitive sensors fabricated on said first surface interspersed with said first array sensors, said further array sensors being dimensionally too small to effectively couple mm-wave energy, said mm-wave sensors each having connected thereto a microantenna of a size substantially matched to the wavelength of the mm-waves for coupling received mm-wave radiation to the mm-wave sensors, said mm-wave sensors each having electrical output means.
1 more element
Dependencies are inferred from the claim text.