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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsKazuo Koya, Yoshiharu Konya
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The invention provides an efficient method for the dehydration, i.e. removal of silicon-bonded hydroxy groups, of a porous silica body before vitrification as a precursor of quartz glass-made optical fibers obtained by the flame hydrolysis of a silicon compound and deposition of fine silica particles formed therefrom. The problems and disadvantages accompanying the use of conventional dehydrating agents can be solved in the invention by heating the hydroxy-containing porous silica body at 1000.degree. to 1300.degree. C. in an atmosphere containing thionyl fluoride or sulfuryl fluoride as the dehydrating agent which is also effective as a dechlorinating agent so that the optical fibers prepared from the quartz glass material of the invention are highly transparent and resistant against hydrogen-containing atmosphere at elevated temperatures.
A method for the preparation of a dehydrated quartz glass material which comprises the steps of:
A method for the preparation of a dehydrated quart material which comprises dehydrating a porous silica body containing hydroxy groups in an atmosphere containing an oxyfluoride of sulfur selected from the class consisting of thionyl fluoride SOF.sub.2 and sulfuryl fluoride SO.sub.2 F.sub.2 and vitrifying the porous silica body, said dehydrating and vitrifying reactions being carried out by heating the porous silica body at a temperature range of 1000.degree. to 1600.degree. C. for a sufficient time to first dehydrate the porous body at lower dehydration temperatures within said temperature range and then vitrify the dehydrated body into a transparent quartz body at higher vitrification temperatures within said temperature range.
Dependencies are inferred from the claim text.