Substrate rotation method and apparatus
AssigneeComptech, Incorporated
InventorEdward J. Slabaugh
Life of this patent
Estimating the term…
Abstract
A frame which carries a plurality of circular substrates seated in grooves in planar alignment. The substrates are seated in grooves defined within the circumferential periphery of apertures within the frame. Each groove and aperture have a diameter slightly larger than the substrate, with the groove contacting only a fraction of the rim of the substrate so that the substrate may orbit within the groove as the frame is provided with circular oscillations. This causes rotation of the substrate in the groove, i.e. the rim of the substrate "walks" around the inner circumference of the groove.
Claims16
Method for treating a disk-shaped substrate comprising,
- mounting a disk-shaped substrate in a planar frame having a front side and a rear side, said frame having a section wherein said sides are spaced apart to define an annular groove, the groove having a diameter larger than the diameter of the substrate, whereby the groove retains the substrate, but the substrate is able to rotate within the groove and a portion of the substrate is free from contact with said groove, and
- providing rotational oscillations to the frame, about an axis non-concentric with the substrate, the amplitude of the oscillations being substantially less than the diameter of the substrate, whereby rotational oscillation of the frame causes centrifugal rotation of the substrate about the periphery of said annular groove.
Apparatus for treating disk shaped substrates comprising,
- a plurality of disk shaped substrates,
- frame means for holding said plurality of disk shaped substrates in planar alignment, said frame means defining a plurality of grooved apertures, each aperture of a diameter slightly larger than the diameter of one of said disk shaped substrates intended to be seated therein, the groove of each aperture being substantially concentric with said aperture and having a front wall and a rear wall, said walls contacting a sufficient fraction of the peripheral surface of a seated disk for retaining the disk in the aperture but not contacting another fraction of the peripheral surface of the same disk so as to allow centrifugal motion of said disk in said groove, and
- means for providing rotational oscillations to the frame, about an axis non-concentric with the disk, the amplitude of the oscillations being substantially less than the diameter of the substrate, whereby rotational oscillation of the frame causes centrifugal rotation of the substrates about the periphery of said grooves.
Apparatus for treating disk shaped substrates comprising,
- a plurality of disk shaped substrates,
- frame means for holding said plurality of disk shaped substrates in planar alignment, said frame means defining a plurality of annularly grooved apertures, each aperture being of a diameter slightly larger than the diameter of one of said disk shaped substrates intented to be seated therein, the annular groove of each aperture contacting a sufficient fraction of the peripheral surface of a seated disk on each side thereof for retaining the disk in the aperture but not contacting another fraction of the peripheral surface of the same disk so as to allow centrifugal motion of said disk in said groove, and
- a motor driven crank, said crank connected to said frame means for providing rotational oscillations to the frame, about an axis non-concentric with the disk, the amplitude of the oscillations being substantially less than the diameter of the substrate, whereby rotational oscillation of the frame causes centrifugal rotation of the substrates in the annular grooves.
Dependencies are inferred from the claim text.