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US 4,646,678 AGranted
Thin film deposition
AssigneeNima Technology Limited
InventorFrank A. Grunfeld
Life of this patent
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AssigneeNima Technology Limited
InventorFrank A. Grunfeld
Estimating the term…
An apparatus for depositing a mono or multimolecular layer film on a substrate has a trough (1) in which the liquid sub-phase (W) is received, the sub-phase carrying a monomolecular layer film of e.g. a diacetylenic fatty acid. The apparatus has a barrier system (4) consisting of a boom (40) which is pivotted on the center of a rigid spoked ring (42) and pivotable towards and away from the adjacent spoke to compress the molecular layer the desired amount. The vertical position of the ring is adjustable by bolts (24) to position the upper surface of the adjacent spoke (41) and lower surface of the boom (40) below but not through the liquid surface. This enables the monomolecular layer to be compressed without leakage of molecules and also allows contaminants to be collected by sweeping the boom across the surface before the layer is added.
Apparatus for depositing a mono or multimolecular layer film on a substrate, said apparatus comprising a receptacle for receiving a liquid sub-phase for carrying a molecular layer film on the surface thereof, barrier means for enclosing a portion of the surface area of said liquid sub-phase, said barrier means including a fixed barrier member, a movable barrier member angularly movable in a substantially horizontal plane disposed above said fixed barrier member towards and away from said fixed barrier member for adjusting the effective area of said enclosed surface portion to enable lateral compression of said molecular layer film on said sub-phase surface, and means for dipping said substrate through said molecular layer film on said liquid sub-phase surface whereby to deposit a molecular layer of said film of said substrate.
Apparatus for depositing a mono or multimolecular layer film on a substrate, said apparatus comprising a housing, a receptacle supported by said housing for receiving a liquid sub-phase for carrying a molecular layer film on the surface thereof, said housing and said receptacle defining a space therebetween for containing fluid, barrier means for enclosing a portion of the surface area of said liquid sub-phase, said barrier means including a fixed barrier member, a movable barrier member angularly movable in a substantially horizontal plane towards and away from said fixed barrier member for adjusting the area of said surface area portion to enable lateral compression of said film on said sub-phase surface, said moveable barrier member having a lower edge and said fixed barrier member having an upper edge, and wherein said lower edge of said moveable barrier member is in substantially the same horizontal plane as said upper edge of said fixed barrier member, means for supporting said barrier means in said receptacle for enabling adjustment of the vertical position of said barrier means for lowering said edges below but not through the surface of said liquid sub-phase, and means for dipping said substrate through said molecular layer film on said liquid sub-phase surface whereby to deposit a molecular layer of said film on said substrate.
Dependencies are inferred from the claim text.