Method for producing a multilayer ceramic circuit board
AssigneeFujitsu Limited
InventorsKazuaki Kurihara, Nobuo Kamehara, Hiromitsu Yokoyama, Hiromi Ogawa, Kishio Yokouchi, Yoshihiko Imanaka, Koichi Niwa
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AssigneeFujitsu Limited
InventorsKazuaki Kurihara, Nobuo Kamehara, Hiromitsu Yokoyama, Hiromi Ogawa, Kishio Yokouchi, Yoshihiko Imanaka, Koichi Niwa
Estimating the term…
A method for producing a multilayer ceramic circuit board including the steps of forming a multilayer structure consisting of patterns of copper-based paste and glass-ceramic layers, the glass-ceramic layers consisting of a mixture of 10 percent to 75 percent by weight of .alpha.-alumina, 20 percent to 60 percent by weight of crystallizable or noncrystallizable glass which can be sintered at a temperature lower than the melting point of copper, and 5 percent to 70 percent by weight of quartz glass, based on the total weight of the glass-ceramic, blended with a binder containing a thermally depolymerizable resin; prefiring the multilayer structure in an inert atmosphere containing water vapor, the partial pressure of which is 0.005 to 0.3 atmosphere, at a temperature where the thermally depolymerizable resin is eliminated; and firing the multilayer structure in an inert atmosphere containing no water vapor at a temperature below the melting point of copper so as to sinter the glass-ceramic.
A method for producing a multilayer ceramic circuit board for use with copper conductors comprising the steps of:
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