Method of repairing a defective photomask
AssigneesAT&T Technologies, Inc., Bell Telephone Laboratories, Incorporated
InventorsGeorgia J. Fisanick, Michal E. Gross, Gary L. Wolk
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Abstract
A process of laser-induced metal deposition for repairing transparent defects (18) in patterned metal films (14) of photomasks (10). The process comprises the steps of (a) coating the surface (16) of the substrate (12) having the film (14) thereon with a layer of metal-organic compound (50); (b) exposing the portions of the layer of metal-organic compound (50) overlying the defects (18) to a beam (24) of electromagnetic radiation from a laser (22); (c) ramping the power level of the radiation beam (24) delivered by the laser (22) until a metal patch (52) is reflective and adherent is formed; and (d) removing the unexposed portions of metal-organic compound (50) remaining on the substrate surface (16).
Claims15
A method of depositing metal on a substrate, comprising the steps of
- (a) applying a metal-organic compound to a substrate;
- (b) exposing the metal-organic compound to light radiation;
- and
- (c) ramping the power level of the light radiation delivered to the metal-organic compound to cause said compound to decompose to volatile components and a metal film which is adherent to the substrate.
A method of repairing an opening in an opaque film on a substrate, comprising the steps of:
- (a) coating the opening with a layer of metal-organic compound;
- (b) exposing the portion of the layer of metal-organic compound overlying the opening to a beam of light radiation;
- and
- (c) ramping the power level of the light radiation delivered to said portion to cause the portion to become opaque and adherent to the substrate.
A method of repairing a transparent defect in a thin film photomask pattern comprising:
- (a) coating the surface of the photomask having the film thereon with a layer of metal-organic compound which decomposes with an exothermic overall heat of reaction;
- (b) exposing the portion of the layer of metal-organic compound overlying the defect to a beam of electromagnetic radiation from a laser for initiating the decomposition of the metal-organic compound;
- (c) ramping the power level of the radiation delivered by the laser so as to completely decompose the metal-organic compound whereby the organic portion is vaporized and the metal portion is deposited into the defect;
- and
- (d) removing the unexposed metal-organic compound remaining on the photomask surface.
Dependencies are inferred from the claim text.