Vapor phase epitaxial growth method of zinc selenide and zinc selenide-sulphide by organometallic chemical vapor deposition
AssigneeSumitomo Chemical Company, Limited
InventorsShigeo Fujita, Yoshinobu Matsuda, Akio Sasaki
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Abstract
A zinc selenide or zinc selenide-sulphide epitaxial crystal is grown at a growth temperature of about 180.degree.-320.degree. C. by organometallic chemical vapor deposition by using zinc alkyl and hydrogen selenide and/or hydrogen sulphide. An as-grown crystal presented an n conductivity type low resistivity and exhibited a narrow near-band gap emission peak. Besides a crystal of the same material as the epitaxial layer, crystals of group III-V, group IV, and so forth having the same or similar crystal structure as the epitaxial layer can be used as an underlayer for the growth.
Claims2
A method for epitaxially growing a zinc selenide single crystal or a zinc selenide-sulphide mixed single crystal by organometallic chemical vapor deposition epitaxial growth, comprising the steps of:
- providing a mixture of zinc alkyl and hydrogen selenide, or a mixture of zinc alkyl, hydrogen selenide and hydrogen sulphide, as starting materials for growing a zinc selenide or a zinc selenide-sulphide single crystal, respectively;
- supplying said starting materials to a reaction vessel, said reaction vessel having a substrate on which the crystal is to be grown, at a rate of 10.sup.-3 to 10.sup.-6 mole per min of the zinc alkyl and 10.sup.-2 to 10.sup.-6 mole per min of hydrogen selenide or a mixture of hydrogen selenide and hydrogen sulphide, the molar ratio of the zinc alkyl to hydrogen selenide or to the mixture of hydrogen selenide and hydrogen sulphide being within the range of 1/100 to 10/1;
- and
- growing a zinc selenide or a zinc selenide-sulphide epitaxial crystal on the said substrate at a temperature between 180.degree. and 320.degree. C.
Dependencies are inferred from the claim text.