Pressure sensor
AssigneeYokogawa Hokushin Electric Corporation
InventorsToshitsugu Ueda, Fusao Kohsaka, Yoshinobu Sugihara
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Abstract
A pressure sensor which detects delicate changes in pressure as small as 0.01 .mu.m water column by detecting displacement or torque in a movable plate. The sensor comprises a fixed plate in which slits are formed, a movable plate on which pressure to be measured is impressed, a supporting member which supports the movable plate at two points on a straight line passing through its center of gravity so as to enable the movable plate to rotate thereabout, and a detecting means for detecting displacement or torque in the movable plate. The different pressures act on the movable plate to cause the rotation thereof and the displacement or torque so that such displacement corresponds to the pressure difference.
Claims12
A pressure sensor comprising
- a fixed plate comprising slits through which pressure is introduced;
- a movable plate disposed opposite to said fixed plate and being subjected to a first pressure and a second pressure;
- a supporting member rotatably supporting said movable plate at two points on a straight line passing through the center of gravity of said movable plate;
- wherein said first pressure is applied on one surface of said movable plate and said second pressure is introduced through said slits in said fixed plate and is impressed on the other side of said movable plate, thereby to rotate said movable plate in accordance with the difference between said first pressure and said second pressure;
- and
- detecting means for detecting displacement or torque in said movable plate caused by said rotation of said movable plate, and for generating a signal indicative of said displacement or torque corresponding to said difference between said first pressure and said second pressure.
Dependencies are inferred from the claim text.