Process and apparatus for recovering inert gas
AssigneeHitachi, Ltd.
InventorsKazuo Someya, Osamu Kita, Masaomi Tomomura
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AssigneeHitachi, Ltd.
InventorsKazuo Someya, Osamu Kita, Masaomi Tomomura
Estimating the term…
A process and apparatus for recovering a high-purity inert gas by removing the impurities in a used inert gas (e.g., Ar), comprising a combustible component reaction step and reaction unit for adding oxygen to a raw gas containing a carbonaceous combustible component to thereby react the combustible component in said raw gas with the oxygen; a carbon dioxide gas removing step and removing unit for removing the carbon dioxide in the raw gas sent from said combustible component reaction unit; an oxygen reaction step and reaction unit for adding hydrogen to the raw gas after the carbon dioxide gas removal to react the oxygen remaining in said raw gas with the hydrogen; a moisture removing step and removing unit for removing the moisture in the raw gas sent from the oxygen reaction unit; and a refining step and refining unit for removing the remaining impurities from the raw gas after the moisture removal to recover a high-purity inert gas.
A process for recovering an inert gas, comprising:
An apparatus for recovering an inert gas comprising:
A process for recovering an inert gas, comprising:
An apparatus for recovering an inert gas, comprising:
Dependencies are inferred from the claim text.