Method for growing multicomponent compound semiconductor crystals
AssigneeFujitsu Limited
InventorKazuo Nakajima
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Abstract
A method and apparatus for growing crystals of a more than three multicomponents compound semiconductor from its growth solution in which a source material containing at least one solute element is immersed and dissolved in the growth solution by conducting DC electric current from a current supplying electrode immersed in the growth solution through the growth solution to the source material, and thus a desired composition of the growth solution can be constantly maintained. As a result, the composition of the grown crystals of the multicomponents compound semiconductor can be also controlled to a desired proportion.
Claims6
A method for growing crystals of a three or more multicomponent compound semiconductor from its growth solution on a seed crystal or substrate, which method comprises providing a growth solution containing a seed crystal or substrate, immersing a source material containing at least one element which is essential to complete said compound semiconductor in said growth solution, immersing a current supplying electrode in said growth solution, and growing crystals of said three or more multicomponent compound semidconductor from said growth solution on said seed crystal or substrate while dissolving said source material in said growth solution by conducting controlled DC electric current from said current supplying electrode through said growth solution to said source material, thereby constantly maintaining a desired composition of said growth solution during the crystal growth step.
A method for growing crystals of a three or more multicomponent compound semiconductor from its growth solution on a seed crystal or substrate, which method comprises providing a growth solution containing a seed crystal or substrate, immersing two or more source materials each containing at least one element which is essential to complete said compound semiconductor in said growth solution, immersing a current supplying electrode in said growth solution, and growing crystals of said three or more multicomponent compound semiconductor from said growth solution on said seed crystal or substrate while dissolving said source materials in said growth solution by conducting controlled DC electric current from said current supplying electrode through said growth solution to said source materials, thereby constantly maintaining a desired composition of said growth solution during the crystal growth step.
Dependencies are inferred from the claim text.