Stripping composition and method of using the same
AssigneeOlin Hunt Specialty Products Inc.
InventorJoseph J. Sizensky
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Abstract
Disclosed is a stripping composition for effectively removing an organic polymeric material from a substrate. The stripping composition is essentially free of phenol compounds and halogenated hydrocarbon compounds and contains a select amine compound and an organic polar solvent. It has been found that the stripping composition is highly effective, even when the organic polymeric material to be removed from a substrate is a positive resist which has been subjected to high temperature post-baking operations.
Claims11
A method for removing a positive resist from a substrate, wherein said positive resist contains a novolak resin and a diazo ketone sensitizer and has been post-baked at a temperature of at least about 150.degree., comprising contacting said positive resist with a non-aqueous stripping composition which is essentially free of phenol compounds and halogenated hydrocarbon compounds and consisting essentially of:
- (a) from about 2 percent to about 98 percent by weight of an amine compound selected from the group consisting of compounds having the formula:
- ##STR4## wherein n and m are each independently an integer ranging from 1-5, inclusive;
- Y is either --O-- or --NH--;
- and Z is --H, --OH or --NH.sub.2 ;
- and mixtures thereof;
- and
- (b) from about 98 to about 2 percent by weight of an organic polar solvent selected from the group consisting of N-methyl-2-pyrrolidinone, tetrahydrofurfuryl alcohol, isophorone, dimethyl sulfoxide, dimethyl adipate, dimethyl glutarate, sulfolane, .gamma.-butyrolactone, N,N,-dimethylacetamide and mixtures thereof.
The method for removing a positive resist from a substrate, wherein said positive resist contains a novolak resin and a diazo ketone sensitizer and has been post-baked at a temperature of at least 150.degree., comprising contacting said positive resist with a stripping composition consisting of:
- (a) from about 30 percent to about 70 percent by weight of 2-(2-aminoethoxy)-ethanol, 2-(2-aminoethylamino)-ethanol and mixtures thereof;
- and
- (b) from about 70 percent to about 30 percent by weight of N-methyl-2-pyrrolidinone.
Dependencies are inferred from the claim text.