Precise movement device
AssigneeCanon Kabushiki Kaisha
InventorsMikio Suzuta, Hironori Yamamoto, Kazuo Nakazawa
Life of this patent
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Abstract
A precise movement device of the type for guiding a movable member with hydrostatic pressure or a magnetic field and moving the movable member substantially without a friction. The device includes a mechanism for supporting the movable member by the use of hydrostatic pressure or a magnetic field and for guiding the movement of the movable member, and includes a mechanism for generating a resistance against the movement of the movable member when the movable member is to be stopped, such that the movable member can be stopped at a desired position accurately and in a reduced time.
Claims7
A device for use in a semiconductor circuit manufacturing apparatus that includes a stationary portion and a table mounted for movement relative to the stationary portion, said device selectively resisting movement of the movable table, and comprising:
- means for applying a resistance to movement of the movable table, said resistance applying means including a first member having a surface and a second member having a surface opposed to the surface of said first member, one of said first and second members being coupled to the movable table and the other of said first and second members being coupled to the stationary portion of said apparatus, said surfaces of said first and second members being contactable with each other so as to apply resistance against movement of the movable table, and said second member having a port formed in said surface thereof for discharging fluid toward said surface of said first member;
- and
- means for controlling the pressure of the fluid discharged from said port of said second member to control the resistance applied against the movement of the movable table so as to increase the resistance applied when the movable table is to be stopped from moving.
Dependencies are inferred from the claim text.