Back to results
US 4,613,843 AGranted
Planar coil magnetic transducer
AssigneeFord Motor Company
InventorsMichael J. Esper, Russell J. Haeberle, Brian G. Winegar
Life of this patent
Estimating the term…
Abstract
A planar magnetic transducer uses thin film technology to form a coil on a ceramic substrate. A relatively powerful magnet is positioned adjacent the substrate so a changing magnetic reluctance adjacent to the coil can be detected by a voltage change at the coil.
Claims2
A magnetic transducer comprising:
- a generally planar high resistivity substrate having a first major planar surface and an opposing second major planar surface;
- a generally planar first coil having one side secured to said first major planar surface of said substrate;
- a magnet positioned adjacent said second surface on the opposite side of said substrate from said generally planar first coil;
- said planar first coil including an inwardly winding conductive path from an outside connection terminal to an inside connection terminal;
- said first coil being copper formed on chromium;
- said substrate being formed of a ceramic material;
- said conductive path being formed of a plurality of connected conductive runs, each conductive run having a generally rectangular boundary and successively nested within one another, each conductive run having a width of about 5 microns, a spacing of about 5 microns, from an adjacent coil conductive run, and a height in the range of about 1 to 3 microns;
- a non-conducting passivating layer formed on said planar first coil;
- a generally planar second conductive coil having one side secured to said passivating layer on the side opposite from said first coil;
- a conductive interconnection extending through said passivating layer between said first and second coils;
- and
- said second conductive coil being formed of a plurality of connected conductive runs, each conductive run having a generally rectangular boundary and successively nested within one another.
9 more elements
Dependencies are inferred from the claim text.