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US 4,610,771 AGranted
Sputtered films of metal alloy oxides and method of preparation thereof
AssigneePPG Industries, Inc.
InventorF. Howard Gillery
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Abstract
A metal alloy oxide film and sputtering method for its production are disclosed, as well as a high transmittance, low emissivity coated product employing said metal alloy oxide film as an antireflective film in combination with a metallic film such as silver.
Claims20
A high transmittance, low emissivity article comprising:
- a. a transparent nonmetallic substrate;
- b. a first transparent film comprising an oxide reaction product of a metal alloy comprising zinc and tin deposited on a surface of said substrate;
- c. a transparent metallic film deposited on said first metal alloy oxide film;
- and
- d. a second transparent film comprising an oxide reaction product of a metal alloy comprising zinc and tin deposited on said metallic film.
2 more elements
A method for depositing a film comprising an oxide of a metal alloy comprising the steps of:
- a. forming a cathode target comprising a metal alloy of zinc and tin;
- b. placing a substrate to be coated in an evacuated chamber with said cathode target;
- and
- c. sputtering said metal alloy cathode target in a reactive atmosphere comprising oxygen thereby depositing a metal alloy oxide film on a surface of said substrate.
1 more element
A method for making a multiple layer high transmittance, low emissivity coated product comprising the steps of:
- a. placing a transparent, nonmetallic substrate in a sputtering chamber;
- b. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a transparent metal alloy oxide film on a surface of said substrate;
- c. sputtering a silver cathode target, in an inert atmosphere to deposit a transparent silver film on said metal alloy oxide film;
- and
- d. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a metal alloy oxide film on said silver film.
2 more elements
Dependencies are inferred from the claim text.