Apparatus for processing articles in a controlled environment

Apparatus for processing articles in controlled environments comprising

• a tunnel whose wall is provided with an opening which gives access to a chamber which is connected to the tunnel in a vacuum-tight manner and in which a processing step can be carried out,
• a conveyor present in the tunnel for transporting the articles through the tunnel, which conveyor has seats for receiving holders that can support the articles,
• transport means by which the articles supported by a holder which is carried by the conveyor into a position opposite to the opening in the wall of the tunnel, can be introduced into the chamber and recovered from the chamber into the tunnel and
• means by which a controlled environment can be created in the chamber,
• characterized in that the tunnel is endless and the conveyor follows a closed path, the tunnel has in its wall several openings each giving access to a respective processing chamber which is connected to the tunnel in a vacuum-tight manner, and an opening giving access to a lock chamber which is connected to the tunnel in a vacuum-tight manner and in which articles can be locked through;
• in that the apparatus can be sealed from its surroundings in a vacuum-tight manner by means of a panel in the outside wall of the lock chamber;
• in that the chambers can be sealed from the tunnel in a vacuum-tight manner;
• and
• in that the lock chamber, processing chambers and the tunnel each have means by which a controlled environment can be created therein.