Height measuring system
AssigneeGeneral Signal Corporation
InventorsMichael D. Turner, Jacques Roch
Life of this patent
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Abstract
The invention of this disclosure is a profiling and testing system that uses an air probe to determine the contour of a wafer containing a plurality of dies so that an electrical sensor may automatically step from die to die and test the completed dies in the wafer.
Claims11
A system for determining the height of specific points on a wafer, and the approximate location of a plurality of dies, that comprise said wafer said system comprising:
- (a) a chuck for holding a wafer containing a plurality of dies of various positions;
- (b) a probe that senses differences in air pressure between specific points on the wafer and said probe;
- (c) a comparator coupled to the output of said probe for comparing the height sensed by said probe to a reference level stored in said comparing means and determining whether or not said probe is at, above, or below said reference level;
- (d) a computer coupled to the output of said comparator for determining the relative orientation of said probe and location of said dies;
- and
- (e) means whose input is coupled to the output of said computer and whose output is coupled to the input of said chuck for moving said chuck to specified X, Y, Z locations so that said probe may sense different points on said wafer, and said computer will determine a mathematical approximation of the surface configuration of said wafer wherein the location of incomplete dies and/or one or more edges of said wafer may be determined by over driving said probe as said wafer is moved relative to said probe so that the edges of said wafer will be determined the moment said comparator indicates that said probe is below the reference level and said computer determines if there is a complete or incomplete die at that edge location.
A system for profiling the surface of a wafer containing a plurality of completed and/or incompleted dies so that one or more electronic and/or electrical test sensors will be able to automatically step from completed die to completed die, said system comprising:
- (a) means for holding a wafer at various positions, said wafer contains a plurality of completed or incompleted dies, which have one or more test pads;
- (b) a probe that senses differences in air pressure between a point on said wafer and said probe;
- (c) comparing means coupled to the output of said probe for comparing the height sensed by said probe to a reference level stored in sid comparing means and determining whether or not said probe is at, above or below said reference level;
- (d) computing means coupled to the output of said comparing means for computing the relative orientation of said probe and the height of specific points on said wafer as said probe, probes the surface of said wafer so that said computer means will compute a mathematical approximation of the surface configuration of said wafer and know the location of incomplete dies and the location of the test pads of each die;
- (e) means whose input is coupled to the output of said computing means and whose output is coupled to the input of said holding means for moving said holding means to specified X, Y, Z locations so that said probe may sense different points on said wafer;
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- (f) one or more electronic and/or electrical test sensors that are positioned in such a manner that the test pads of each completed die will be individually sensed by said sensors when said computing means directs said moving means to move a specific completed die in contact with said sensors.
A method for profiling the surface of a wafer containing a plurality of completed and/or incompleted dies having test pads in which electrical and/or electronic tests will be automatically performed on each test pad of said completed dies, said method includes the steps of:
- (a) probing a few specific points on a wafers surface with an air probe;
- (b) comparing the heights sensed by said probe to a reference level;
- (c) computing a X, Y, Z profile of the surface of the wafer using the height sensed by said probe to determine an approximation of the surface characteristics of the wafer;
- (d) determine the approximate location of incomplete dies and the approximate location of the test pads of each completed die using said X, Y, Z profile;
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- (e) performing electrical and/or electronic tests on the test pads of the completed dies.
Dependencies are inferred from the claim text.