Planar inertial sensor

Abstract

A planar inertial sensor includes a sheet member having one inner planar element adapted for limited angular motion about a (Y) axis perpendicular to an input (Z) axis. In a gyroscope form, the inner planar element is also adapted for limited angular motion about an (X) axis normal to and intersecting with the Y axis. The gyroscope form includes an outer driving planar element which is continuously driven in an oscillatory manner in limited excursions about the Y axis. The driving element is coupled to the inner element so that oscillatory motion of the driving element is coupled to the inner element. Position sensors provide signals representative of the angular position of the inner element relative to the X axis, which in turn are representative of angular rates impressed on the sensor about the input (Z) axis which is orthogonal to the X and Y axes. In an accelerometer form, the inner planar element is characterized by a mass imbalance across the Y axis. Position sensors provide signals representative of the angular position of the inner element, which in turn are representative of the acceleration of the sensor in the direction of the input (Z) axis.

Dependencies are inferred from the claim text.