Surface acoustic wave device for sensing the presence of chemical agents
AssigneeThe United States of America as represented by the Secretary of the Army
InventorArthur Ballato
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Abstract
A surface acoustic wave device is provided for sensing the presence of chemical agents by chemo-electronic means. The device includes a quartz substrate and means deposited on the substrate for propagating and receiving surface acoustic waves along the surface of the substrate. Regions are provided on the substrate containing etched tunnels, the walls of the etched tunnel being coated within with a chemical substance sensitive to the chemical agent to be detected. When surface acoustic waves are caused to pass over these regions, the reaction of the chemical agent to be detected with the chemical substance causes a change in the acoustic wave velocity.
Claims5
A surface acoustic wave device for sensing the presence of chemical agents by chemo-electronic means, said device comprising a quartz substrate, means deposited on the substrate for propagating and receiving surface acoustic waves along the surface of the quartz substrate and regions on said substrate containing etched tunnels coated within the walls of the tunnel with a chemical substance sensitive to the chemical agent to be detected so that when surface acoustic waves are caused to pass over these regions, the reaction of the chemical agent to be detected with the chemical substance causes a change in the acoustic wave velocity.
Dependencies are inferred from the claim text.