Miniature liquid junction reference electrode and an integrated solid state electrochemical sensor including the same
AssigneeCentre Suisse d'Electronique et de Microtechnique S.A.
InventorsRosemary L. Smith, Scott Collins
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Abstract
This invention relates to a miniature reference electrode of the liquid junction-type which is utilized by an integrated electrochemical sensor, which functions as an Ion Sensitive Field Effect Transistor.
Claims8
A miniature reference electrode providing both electrical connection and a liquid junction between a reference liquid solution and a solution to be tested, comprising:
- a substrate provided with a cavity to hold said reference liquid solution;
- a membrane comprising porous silicon closing a first end of said cavity;
- means for applying fixed control voltage to said reference liquid solution;
- and
- means for hermetically closing a second end of said cavity.
An integrated chemical sensor including an Ion Sensitive Field Effect Transistor formed in a silicon substrate and a miniature reference electrode on said silicon substrate, wherein said electrode comprises:
- a cavity provided in said silicon substrate to hold a reference liquid solutiion;
- a membrane comprising porous silicon, said membrane closing a first end of said cavity;
- means for applying a fixed control voltage to said reference liquid solution;
- and
- means for hermetically closing a second end of said cavity.
Dependencies are inferred from the claim text.