Apparatus for feeding wafers and the like

Abstract

An apparatus for feeding semiconductor substrates (i.e., wafers) or the like along a path to a processing section such as a hot plate, and moving the same therefrom to the next process. The apparatus includes: a belt conveyor means preferably comprised for a pair of belts and having a horizontal top surface which can be driven along the feed path; means for raising and lowering the belt conveyor means to allow the wafers to be placed into position and taken out of position on the processing section; a processing plate associated with the processing section having a suction tube through which a vacuum is applied to a wafer on the processing plate, and also having grooves to receive the belts when the wafer is placed on the processing plate; and elevator means, which cooperate with the belt conveyor means, for raising the wafer to detach from the plate. The elevator means protrudes and withdraws with respect to the upper surface of the processing plate, and may take several forms such as horizontal longitudinal members which are received by grooves in the processing plate, or pins projecting from the holes in the processing plate through which the pneumatic suction is applied to the wafers during the heat treatment provided by the hot plate.

Dependencies are inferred from the claim text.