Intermetallic semiconductor ohmic contact
AssigneeInternational Business Machines Corporation
InventorsThomas N. Jackson, Peter D. Kirchner, George D. Pettit, Jerry M. P. Woodall
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Abstract
A 10.sup.-6 ohm cm.sup.2 ohmic contact is provided by formation of a 20-50 Angstroms deep surface region with a net donor density of higher than 5.times.10.sup.19 /cc. An amphoteric dopant of Si or Ge is incorporated in a pinned Fermi level condition so that an enhanced surface donor concentration occurs.
Claims7
An ohmic electrical device connection comprising in combination
- a first region in a group III-V intermetallic semiconductor crystal having a carrier density in the bulk thereof below 2.times.10.sup.19 /cc,
- a barrier region between 20 and 50 Angstroms in thickness positioned in a surface of said first region,
- said barrier region containing an amphoteric conductivity type determining impurity having a net donor carrier density of above 5.times.10.sup.19 /cc and
- a metal in contact with said barrier region in said surface.
An ohmic contact to a group III-V intermetallic semiconductor crystal comprising in combination p1 a surface region containing an amphoteric impurity exhibiting a net donor density above 5.times.10.sup.19 /cc and a width from the surface to a region of lower net donor density in the range of 20-50 Angstroms, and
- a metal layer in contact with said surface region.
The ohmic contact of claim 8 wherein said crystal is GaAs, said amphoteric dopant is at least one of Si, Ge and said surface region has a net donor density of above 5.times.10.sup.19 and said surface region is in the range of 20-50 Angstroms thick.
In an ohmic contact to a group III-V intermetallic semiconductor crystal of the type wherein a barrier region at the interface of said crystal and a metal is sufficiently thin to permit quantum mechanical tunneling, the improvement comprising
- said barrier region having a thickness in the range of 20 to 50 Angstroms and
- said barrier region containing an amphoteric dopant on both donor and acceptor sites in different sublattices of said crystal exhibiting thereby a net donor density of 5.times.10.sup.19 and above, said net donor density being higher than the net donor density in the bulk of said crystal.
Dependencies are inferred from the claim text.