Method of anodizing and sealing aluminum
AssigneeTexas Instruments Incorporated
InventorsMillard J. Jensen, Jules D. Levine
Life of this patent
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Abstract
The disclosure relates to a method of sealing the surface of an aluminum member, such as an aluminum foil, from the environment by first placing the foil in an H.sub.2 SO.sub.4 bath to form an oxide which normally will not provide a total seal of the aluminum from the environment and then placing the aluminum member with oxide thereon in an H.sub.3 PO.sub.4 bath to close the pores in the oxide layer and provide sealing of the aluminum from the environment. This process also passivates the silicon.
Claims2
A method of anodizing and sealing a combination of aluminum and semiconductor material comprising the steps of:
- (a) providing an aluminum member coupled to a semiconductor material,
- (b) forming an oxide coating on said aluminum member, and
- (c) anodizing said member from (b) in a solution of about 0.5% H.sub.3 PO.sub.4 for about one half minute to seal the aluminum and oxidizing said semiconductor material.
Dependencies are inferred from the claim text.