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US 4,581,108 AGranted
Process of forming a compound semiconductive material
AssigneeAtlantic Richfield Company
InventorsVijay K. Kapur, Uppala V. Choudary, Alan K. P. Chu
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Abstract
A process of forming a compound semiconductive material having a plurality of constituent elements comprising electrodepositing a plurality of such constituent elements and subsequently heating the deposits to produce the desired semiconductive material.
Claims13
A process of forming a compound semiconductive material having a plurality of constituent elements, comprising:
- electrodepositing a layer of a first constituent element on a substrate;
- electrodepositing a layer of a second constituent element on said first layer;
- and
- thereafter heating said deposited elements in a reactive atmosphere, which contains a further constituent element of the desired semiconductive material to interdiffuse and chemically react the constituent elements to produce said semiconductive material.
1 more element
Dependencies are inferred from the claim text.