Process and apparatus for producing a gas of high purity by vaporization of a cryogenic liquid
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorJean-Renaud Brugerolle
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Abstract
The reservoir 1 contains in its lower part a purifying vessel 2 which contains a plate 9 having a bell means communicating with the reservoir and provided with an overflow pipe 12 through which liquid overflows into a bath having a constant level. When gas is drawn off from the top of the purifying vessel, liquid taken from the lower bath is vaporized in an exterior vaporizer 3 and the gas produced passes through the two baths in succession. In this way it is possible to obtain the gases having high purity devoid of particles of dust which are required for certain applications and in particular in the electronic component industry.
Claims11
A process for obtaining a substantially dust-free gas from a dust-containing cryogenic liquid stored in a reservoir, the process comprising precluding the presence of dust in a vaporized gas by:
- providing an auxiliary vessel having a constantlevel compartment;
- supplying said liquid from said reservoir to said compartment, whereby a constant level bath is formed in said compartment;
- vaporizing a desired quantity of said liquid, whereby the liquid level in the reservoir drops;
- washing the gas produced by said vaporizing step by passing the same through said constant-level bath;
- and
- drawing off said substantially dust-free gas from an upper portion of said compartment.
An apparatus for producing a substantially dust-free gas by vaporizing a dust-containing cryogenic liquid, said apparatus comprising means designed for precluding the presence of dust in a vaporized gas, comprising a reservoir for the cryogenic liquid, a vaporizer, a pipe for drawing off the gas, an auxiliary vessel containing a bath of constant level which comprises a body of liquid interposed between said vaporizer and said drawing-off pipe, and means for supplying liquid to said auxiliary vessel from said reservoir, thereby progressively reducing the level of the liquid in said reservoir.
Dependencies are inferred from the claim text.