Detecting thermal waves to evaluate thermal parameters
AssigneeTherma-Wave Partners
InventorsAllan Rosencwaig, Jon Opsal, Walter L. Smith, David L. Willenborg
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Abstract
A method and apparatus is disclosed for detecting thermal waves. This system is based on the measurement of the change in reflectivity at the sample surface which is a function of the changing surface temperature. The apparatus includes a radiation probe beam that is directed on a portion of the area which is being periodically heated. A photodetector is aligned to sense the intensity changes in the reflected radiation probe beam which results from the periodic heating. These signals are processed to detect the presence of thermal waves.
Claims7
An apparatus for detecting thermal waves in a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the thermal waves, said thermal waves being generated by a periodic localized heating at a spot on the surface of the sample, said apparatus comprising:
- a probe for emitting a beam of radiation;
- means for directing the beam of radiation from the probe within a portion of the periodically heated area on the sample surface in a manner such that the beam of radiation from the probe reflects off the surface of the sample;
- means for sensing the radiation probe beam reflected off the periodically heated area on the sample surface and measuring the intensity variations thereof resulting from the periodic changes in optical reflectivity of the sample induced by the periodic heating;
- and
- means for processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample and deriving thermal wave signals therefrom to evaluate thermal parameters of a sample.
A method of detecting thermal waves in a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the thermal waves, said thermal waves being generated by a periodic heating at a spot on the surface of the sample, said method comprising the steps of:
- directing a radiation beam within a portion of the periodically heated area on the surface of the sample in a manner such that the radiation beam reflects off the surface of the sample;
- sensing the radiation beam after it has reflected off the periodically heated area on the surface of the sample;
- measuring the intensity variations of the sensed reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample induced by said periodic heating;
- and
- processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample and deriving thermal wave signals therefrom to evaluate thermal parameters of a sample.
Dependencies are inferred from the claim text.