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US 4,575,942 AGranted
Ultra-precision two-dimensional moving apparatus
AssigneeHitachi, Ltd.
InventorShigeo Moriyama
Life of this patent
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Abstract
An ultra-precision two-dimensional moving apparatus is disclosed, in which a fine-moving table is two-dimensionally movably held on a coarse-moving carriage. This fine-moving table is driven finely in X, Y and .theta. directions by three piezoelectric element actuators. The fine-table position is measured by a laser interferometric measurement system. In response to the error signal between the measured position and a desired position, the piezoelectric element actuators are driven by closed loop control.
Claims15
An ultra-precision two-dimensional moving apparatus comprising:
- a coarse-moving carriage movable two-dimensionally;
- a coarse drive mechanism for moving said coarse-moving carriage two-dimensionally;
- a fine-moving table adapted to finely move two-dimensionally on said coarse-moving carriage;
- a mechanism for finely-movably holding said fine-moving table on said coarse-moving carriage with a gap therebetween, the gap being filled with a viscous fluid;
- and
- at least three linear-actuating means interposed between said coarse-moving carriage and said fine-moving table for finely driving said fine-moving table, each of said linear-actuating means being provided with at least one member which is rigid in the direction of the central axis thereof and flexible in a direction tilted with respect to the central axis thereof.
3 more elements
Dependencies are inferred from the claim text.