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US 4,575,408 AGranted
Method for floating transport of substrates
OwnerEdward Bokinventor
Life of this patent
Estimating the term…
Abstract
Improved apparatus (10), including passage (22) for inter-cushion processing and transport of substrates (12) towards and from process modules (14) and (16) for main processing of said substrates (12) at non-atmospheric pressure in a series of successive process chambers (64), located in between successive processors/transporters (66), in which secondary processing and transport of said substrates (12) take place.
Claims13
Method for floating gaseous transport and processing of substrates and tape comprising:
- (a) introducing said substrates into an elongated transport and processing passage;
- (b) maintaining a pressurized source of gaseous transport medium in communication with said passage;
- (c) injecting said pressurized gaseous transport medium from above and below into said passage via a successive series of transversely aligned gaseous medium supply ports, while
- (d) simultaneously removing said gaseous transport medium via a series of transversely arrayed discharge ports intersecting said passage both before and behind each said series of gaseous medium supply ports;
- and
- (e) processing the moving substrates within said passage.
3 more elements
Dependencies are inferred from the claim text.