Composite back-etch/lift-off stencil for proximity effect minimization
AssigneeInternational Business Machines Corporation
InventorsKaren H. Brown, David F. Moore, Bernard J. C. van der Hoeven, Jr.
Life of this patent
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Abstract
This composite back-etch/lift-off stencil method avoids the uncontrolled changes in the properties of contacts in small devices caused by the close proximity of the lift-off resist stencil to the contact area during the precleaning, surface preparation and metal deposition processes. This method limits the area of the wafer exposed to back-etching and thus restores the freedom of choice of contact metallurgy. Back-etching is only applied in the areas of the wafer near to the contact holes; lift-off techniques are used for the rest of the integrated circuit.
Claims2
A method for making integrated circuits having critical wafer areas which are susceptible to proximity effect degradation at critical areas --characterized by--
- (a) patterning a lift-off resist stencil factor with windows including contact dimensions and extension dimensions extending beyond the contact dimensions in the critical areas with respect to proximity effects;
- (b) depositing contact metal using the windows as a pattern, covering both contact dimensions and extension dimensions;
- (c) patterning a back-etch resist stencil factor over selected portions of said contact metal, providing protection to the underlying layers within the contact dimensions but exposing contact metal within the extension dimensions;
- (d) back etching to the selected pattern of metallization by removing contact metal from the extension dimensions;
- and
- (e) removing said lift-off resist stencil factor and said back-etch resist stencil factor.
A method for making integrated circuits having critical wafer areas with respect to proximity effects, which areas require protection from process-related degradation --characterized by --
- (a) patterning a lift-off resist stencil factor over the wafer omitting the critical areas with respect to proximity effects;
- (b) patterning a combination contact metal stencil factor generally coextensive to the critical areas, using the lift-off resist stencil factor as a pattern, providing coverage with contact metal material in the critical areas not only where desired as a contact metallization, but with excess coverage extending to the boundary of said lift-off resist stencil factor, whereby a composite contact metal/lift-off stencil is completed;
- (c) patterning a back-etch resist stencil over selected portions of said contact metal stencil factor extending less than the entire distance to said lift-off resist stencil factor, to define a desired metal contact configuration;
- (d) back-etching said contact metal stencil factor to the selected configuration of contact metal;
- and
- (e) removing the lift-off resist stencil factor;
- whereby the contact metal remains in the selected configuration and the critical area remains free of lift-off stencil factor and any resulting proximity effects.
Dependencies are inferred from the claim text.