Process and apparatus for manufacturing fine powder
AssigneeSumitomo Electric Industries, Ltd.
InventorsEiji Kamijo, Matsuo Higuchi
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Abstract
A process and an apparatus for manufacturing a fine powder of metals or ceramics are proposed in which a mixed gas of volatile metal compound and/or evaporated metal and a reaction gas is reacted in a discharged state while heating by laser beam.
Claims5
A process for manufacturing a fine powder of a metal or ceramics comprising the steps of mixing a gas of volatile metal compound and/or an evaporated metal and a reaction gas in a gaseous state ionizing the mixture and heating the ionized mixture with a laser beam to produce the powder.
An apparatus for manufacturing a fine powder of a metal or ceramics, said apparatus comprising a reaction chamber into which a mixture of a gas of volatile metal compound and/or an evaporated metal and a reaction gas is introduced for reaction, means for putting said reaction chamber in a discharged state by at least one selected from the group consisting of direct current discharge, high-frequency discharge and microwave discharge, and means for irradiating laser beams through said reaction chamber in a discharged state to heat said mixture.
Dependencies are inferred from the claim text.