Charged particle energy analyzer
AssigneeShimadzu Corporation
InventorHiroshi Yamauchi
Life of this patent
Estimating the term…
Abstract
A charged particle energy analyzer comprises a source for generating radiation to be incident on a sample so as to emit charged particles from the sample, a low energy pass reflection filter for selectively reflecting the charged particles having energy lower than a first value, a high energy pass transmission filter for selectively transmitting the charged particles having energy higher than a second value. The low energy pass reflecting filter comprises a reflector and a first grid. The reflector is a spheroid mirror having two complex focuses, disposed in a symmetrical manner, at which the sample and a detector are disposed. The detector detects the selected charged particles.
Claims9
A charged particle energy analyzer comprising:
- source means for generating radiation and directing said radiation to be incident on a sample so as to emit charged particles from the sample;
- low energy pass reflection filter means for selectively reflecting charged particles having energy lower than a first value, said low energy pass reflection filter means comprising a reflector and first grid means,
- high energy pass transmission filter means for selectively transmitting charged particles having energy higher than a second value;
- and
- detector means for detecting said charged particles;
- wherein said reflector of said low energy pass reflection filter means has two complex focuses symmetrically disposed with respect to the center of said reflector;
- and
- said sample is positioned at one of said focuses and said detector is positioned at the other of said focuses.
A charged particle energy analyzer comprising:
- source means for generating radiation and directing said radiation to be incident on a sample so as to emit charged particles from the sample;
- low energy pass reflection filter means for selectively reflecting charged particles having energy lower than a first value, said low energy pass reflection filter means comprising a reflector and grid means;
- high energy pass transmission filter means for selectively transmitting charged particles having energy higher than a second value;
- and
- detector means for detecting the charged particles;
- wherein said reflector has a center of curvature and said sample and said detector are positioned symmetrically with respect to a line connecting said center of curvature with a point on said reflector;
- and
- said high energy pass transmission filter is positioned within a space generally between the reflector on the one hand and the sample and detector on the other hand.
A charged particle energy analyzer comprising:
- source means for directing radiation to be incident on a sample so as to emit charged particles from the sample;
- low energy pass filter means for selectively passing charged particles having energy lower than first value;
- reflector means for reflecting said charged particles;
- high energy pass filter means for selectively passing charged particles having energy higher than a second value;
- and
- detector means for detecting said charged particles;
- wherein said reflector means has two complex focuses symmetrically disposed with respect to the center of said reflector;
- and
- said sample is positioned at one of said focuses and said detector is positioned at the other of said focuses;
- and
- wherein both said high and low energy pass filter means are contained within a space generally between said reflector and a surface containing said two focuses of the reflector.
Dependencies are inferred from the claim text.