High electromechanical-coupling coefficient surface acoustic wave device
AssigneeNEC Corporation
InventorsHiroshi Shimizu, Yasuyuki Mizunuma
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Abstract
A high electromechanical-coupling surface acoustic wave device has a lithium niobate rotated Y-cut crystal as a piezoelectric substrate, and a thin high-density film formed on a predetermined portion of the lithium niobate rotated Y-cut crystal which includes at least a propagation path along which the surface acoustic wave propagates. A Love wave propagates in the thin or thick high-density film on the surface of the lithium niobate rotated Y-cut crystal substrate, so that the electromechanical coupling coefficient of the thin film can be improved, and spurious response caused by a Rayleigh wave can be eliminated.
Claims7
A high electromechanical coupling surface acoustic wave device comprising a rotated Y-cut lithium niobate crystal substrate for propagating a Love wave mode along a propagation path, and a thin high density film formed on said propagation path on said substrate and having a thickness that reduces the electromechanical coupling coefficient of Rayleigh waves to zero.
Dependencies are inferred from the claim text.