Method of making a bolometric radiation detector
AssigneeBattelle-Institut e.V.
InventorsRolf Hartmann, Albrecht Krah, Hilda Egle, Rudolf Ziegler
Life of this patent
Estimating the term…
Abstract
A bolometric radiation detector wherein the electrically-conductive measuring layer is applied to a carrier film which is supported by a frame. To produce a bolometer of this type the carrier film is produced as a layer on a base material, preferably by anodic or thermal oxidation of the base material. The measuring layer is applied to the carrier film. After providing the base material and the measuring layer with a photoresist layer, the conductors are etched out and a window is made from the reverse side. The carrier film with the measuring layer structure then remains. The parts of the base material that have not been removed serve as a frame for the carrier film.
Claims9
Method of producing a bolometric radiation detector consisting essentially of a thin, temperature-sensitive, electrically-conductive measuring layer on an electrically insulating carrier film which is supported by a frame, the thickness of the measuring layer being less than 100 nm, comprising:
- producing the carrier film on a base material;
- applying a thin conductive layer composed of the material of the measuring layer to the carrier film;
- providing the carrier film base material and the surface of the measuring layer material with a photoresist layer;
- etching the printed conductors out of the conductive layer using a photolithographic method;
- and
- producing a window from the reverse side in such a way that the carrier film with the measuring layer structure mreains, such being supported by a frame that is prepared from the substrate.
Dependencies are inferred from the claim text.