Manufacturing system

A manufacturing system for providing a plurality of different treatments to semiconductor workpieces to manufacture semiconductor devices comprising:

• a conveyance path elongated along a predetermined path;
• a plurality of treatment sections, for subjecting the workpieces to respectively different treatments, said treatment sections being elongated relative to said conveyance path in a direction to intersect said conveyance path and arranged in side-by-side spaced relationship, each of said treatment sections having loading and unloading positions at a side facing said conveyance path;
• and
• conveyance means for moving the workpieces towards the loading positions and unloading positions of said respective treatment sections and along with conveyance path,
• the improvement wherein said plurality of treatment sections and said conveyance path are all located within a clean room area formed such that a first elongated portion of said clean room area is provided for said conveyance path and portions of said clean room area are provided for each of said treatment sections with the treatment section clean room portions being arranged in side-by-side spaced relationship along said first elongated portion and respectively joined to the first elongated portion of said clean room area;
• wherein said conveyance means includes a carrier capable of moving within the first elongated portion of said clean room area;
• and wherein said manufacturing system further comprises a preservation area located outside of said clean room area and adjacent to each of the treatment section clean room areas to permit access to each of said treatment sections from outside of said clean room area for repair and maintenance.