Mask alignment apparatus

A mask alignment apparatus comprising a member having an aperture for mounting a mask thereacross;

• a fixed support means;
• alignment means for aligning said member with respect to said support means, said alignment means including a linear motor means having a linearly moving shaft, said motor means being attached to said member and a flexible linkage between said shaft and said fixed support means, such that movement of said shaft moves said member with respect to said fixed support means to spacially position said mask;
• and
• means for holding and coarse aligning said mask in said aperture in which said coarse aligning means comprises first cylinder means mounted on said member and including a linearly operable rod shaft containing a bearing surface on its end, said surface extending inwardly into said aperture and a second cylinder means mounted on said member and including a linearly operable shaft containing a bearing surface at its end extending inwardly into said aperture, said second cylinder means and bearing surface being disposed opposite from said first cylinder means and bearing surface whereby inward actuation of said second bearing seats a mounted mask against said first and second rolling bearing surfaces.

A mask alignment apparatus comprising a member having an aperture for mounting a mask thereacross;

• a fixed support means;
• and
• alignment means for aligning said member with respect to said support means, said alignment means including a linear motor means having a linearly moving shaft, said motor means being attached to said member and a flexible linkage between said shaft and said fixed support means, such that movement of said shaft moves said member with respect to said fixed support means to spacially position said mask;
• in which said alignment means is positioned internally of said member and said linear motor means is operable to rotatively orient said member with respect to said fixed support means and to move said member in x and y coordinates with respect to said fixed support means.

A mask alignment apparatus comprising a member having an aperture for mounting a mask thereacross;

• a fixed support means;
• alignment means for aligning said member with respect to said support means, said alignment means including a linear motor means having a linearly moving shaft, said motor means being attached to said member and a flexible linkage between said shaft and said fixed support means, such that movement of said shaft moves said member with respect to said fixed support means to spacially position said mask;
• and
• means for detachably mounting a mask to said member, said means for detachably mounting comprises spaced vacuum cups.

A mask alignment apparatus comprising an annular member having an aperture for mounting a mask thereacross;

• means for holding and coarse aligning said mask in said aperture;
• a fixed support means;
• means for flexually mounting said mask in said aperture relative to said member;
• and
• alignment means for moving said member with respect to said support means in X-axis and y-axis coordinates and rotative directions, said alignment means including motor means attached to said member such that operation of said motor means moves said member with respect to said fixed support means to spacially position said mask in x-axis, y-axis and rotative positions.