US 4,543,576 A · System for measuring electrical resistance and temperature during manufacture of thin, conductive films deposited on substrates by means of evaporation or sputter deposition

Abstract

A system for measuring electrical resistance and temperature during the manufacture of thin, conductive films deposited on substrates by means of evaporation or sputter-deposition. A deposition unit with an evacuatable load lock chamber and a rotating substrate holder are employed as the deposition system. The specific electrical resistance of the film is measured according to the principle of the two-point or four-point measuring methods at a reference substrate with specific sample geometry and with low-resistance contacts. The substrate temperature is measured by means of resistance thermometers. With the invention, the transmission of the measured data occurs contact-free by means of electro-magnetic radiation, preferably by means of a telemetric pulse code modulation method.

Claims19

Dependent claims

A system for measuring electrical resistance and temperature during the manufacture of a thin, conductive film deposited on a substrate by means of evaporation or sputter-deposition, comprising:

an evacuated processing unit for deposition of the conductive film and having an evacuatable load lock chamber;
a movable substrate holder;
a reference substrate;
deposited film geometry defining means;
means for measuring an electrical resistance of the deposited film on the reference substrate according to a two-point or four-point measuring method, said means for measuring including low-resistance contacts and resistance thermometer means for measuring substrate temperature;
and transmitting means for producing and transmitting measured data, obtained in conjunction with the measuring means in a contact-free manner, to an exterior of the processing unit by electro-magnetic radiation;
and said means for transmitting being attached as an independent unit to the movable substrate holder.

4 more elements

Dependencies are inferred from the claim text.

System for measuring electrical resistance and temperature during manufacture of thin, conductive films deposited on substrates by means of evaporation or sputter deposition

Life of this patent

System for measuring electrical resistance and temperature during manufacture of thin, conductive films deposited on substrates by means of evaporation or sputter deposition

Life of this patent

Abstract

Claims19