Plane light source unit and radiant heating furnace including same
AssigneeUshio Denki Kabushiki Kaisha
InventorsTetsuji Arai, Tatsushi Igarashi
Life of this patent
Estimating the term…
Loading patent…
AssigneeUshio Denki Kabushiki Kaisha
InventorsTetsuji Arai, Tatsushi Igarashi
Estimating the term…
Disclosed herein is a plane light source unit comprising a plurality of lamps disposed closely with each other in proximity to a mirror with the longitudinal axes of the lamps extending parallelly in a plane. Each of the lamps comprises an elongated sealed tubular body and a filament formed of alternating non-luminous portions and luminous portions and provided within the tubular body along the longitudinal axis of the tubular body. A radiant heating furnace comprising the above plane light source unit and a cooling system therefor is also disclosed. The plane light source unit and a radiant heating furnace incorporating the same light source unit can irradiate light onto a region of a large area with a uniform irradiation energy density. They are suitable for heat treatment of semiconductor wafers.
A radiant heating furnace comprising:
Dependencies are inferred from the claim text.