Microminiature force-sensitive switch
AssigneeTransensory Devices, Inc.
InventorsKurt E. Petersen, Henry V. Allen, James W. Knutti
Life of this patent
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Abstract
A microminiature switch for digitizing different-valued external conditions, such as pressure, temperature of acceleration, is disclosed. The switch includes a silicon wafer having a deflectable, reduced-thickness membrane adapted to move from a relaxed position toward increasingly flexed or bulged positions in response to greater-value changes in such external condition. Movement of the membrane from its relaxed position to more strained positions establishes electrical contact between a common terminal and first one and then progressively more switch-state terminals in the switch, wherein the number of switch states which are closed corresponds to the external condition acting on the switch.
Claims29
A microminiature, force-sensitive, multi-state switch comprising
- a silicon wafer having a reduced-thickness, deflectable membrane adapted to move from a relaxed condition toward increasingly strained conditions upon the application of an increasingly greater force to the membrane,
- a stationary contact member disposed adjacent and spaced from the membrane, with the latter in its relaxed condition, said membrane and contact member forming a pair of confronting surfaces,
- a common terminal,
- a plurality of switch-state terminals, and
- electrical contact means associated with said confronting surfaces for connecting the common terminal first to one and then progressively to more of the switch-state terminals upon movement of the membrane toward increasingly strained conditions.
A microminiature switch for digitizing or monitoring changes in an external condition, such as pressure, temperature or acceleration, said switch comprising
- a silicon wafer having a reduced-thickness deflectable membrane adapted to move between a relaxed condition and a continuum of increasingly strained conditions in response to greater-value changes in such external condition,
- a stationary contact member disposed adjacent and spaced from the deflectable membrane, with the latter in its relaxed condition, said membrane and said contacting member defining a pair of confronting surfaces,
- a common terminal,
- a plurality of switch-state terminals,
- a plurality of spaced electrical contacts carried on one of said surfaces,
- means connecting each contact conductively to a corresponding switch-state terminal, and
- conductor means carried on the other of said surfaces, adapted to connect said common terminal first to one, then progressively to more of said switch-state contacts upon movement of the membrane from its relaxed condition toward increasingly strained conditions.
A microminiature switch for digitizing or monitoring changes in an external pressure, comprising
- a silicon wafer having a flexible, reduced-thickness diaphragm adapted to move from a relaxed condition toward increasingly bulged conditions upon the application of a pressure-related force to one side of the said diaghram,
- a contact plate disposed adjacent and spaced from the other side of the diaphragm, and sealed to side regions of the wafer bordering the diaphragm, to form a fluid-tight chamber covering said other side of the diaphragm, the diaphragm and the plate defining a pair of confronting surfaces within said chamber,
- a common terminal,
- a plurality of switch-state terminals,
- a plurality of spaced electrical contacts carried on one of said confronting surfaces,
- means connecting each contact conductively to a corresponding switch-state terminal, and
- conductor means carried on the other confronting surfaces, adapted to connect said common terminal first to one and then progressively to more of the switch-state terminals upon movement of the diaphragm toward increasingly strained conditions.
A passive, microminiature diaphragm switch comprising
- a silicon wafer having a reduced-thickness, deflectable diaphragm adapted to move from a relaxed condition toward increasing bulged conditions upon the application of an increasingly greater force to the diaphragm,
- a stationary contact member disposed adjacent and spaced from the diaphragm, with the latter in its relaxed condition, the diaphragm and contact member defining a pair of confronting surfaces,
- a pair of switch terminals, and
- electrical contact means associated with said confronting surfaces for connecting said pair of switch terminals conductively when the diaphragm is moved from its relaxed condition to a preselected bulged condition.
Dependencies are inferred from the claim text.