Silicon nitride-containing ceramic material prepared by pyrolysis of hydrosilazane polymers from (R.sub.3 Si).sub.2 NH and HSiCl.sub.3
AssigneeDow Corning Corporation
InventorJohn P. Cannady
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Abstract
A process is disclosed for preparing R.sub.3 SiNH-containing hydrosilazane polymer by contacting and reacting trichlorosilane with a disilazane (R.sub.3 Si).sub.2 NH where R is vinyl, hydrogen, phenyl, or alkyl radicals containing 1 to 3 carbon atoms. These hydrosilazane polymers are useful, when fired at high temperatures, in the formation of silicon nitride and silicon nitride-containing ceramic materials.
Claims24
A method of preparing a silicon nitride-containing ceramic material which method consists of heating a R.sub.3 SiNH-containing hydrosilazane polymer in an inert atmosphere or in a vacuum to a temperature of at least 750.degree. C. until said R.sub.3 SiNH-containing hydrosilazane polymer is converted to a silicon nitride-containing ceramic material, said R.sub.3 SiNH-containing hydrosilazane polymer having been obtained by a process which consisted of contacting and reacting, in an inert, essentially anhydrous atmosphere, trichlorosilane with a disilazane at a temperature in the range of 25.degree. to 300.degree. C. while distilling by-produced volatile products, wherein said disilazane had the general formula
- (R.sub.3 Si).sub.2 NH
- where R is selected from the group consisting of vinyl, hydrogen, phenyl, and alkyl radicals containing 1 to 3 carbon atoms.
Dependencies are inferred from the claim text.